Equipment List
Measuring equipment
- 01 ●
-
- Sputter Equipment

- 02 ●
-
- Slit coater

- 03 ●
-
- Spin coater

- 04 ●
-
- LDI exposure system

- 05 ●
-
- Stepper

- 06 ●
-
- Develop system

- 07 ●
-
- ES Auto System
Etching & Strip

- ES Auto System
- 08 ●
-
- Scribing

- 01 ●
-
- Optical microscope inspection

- 02 ●
-
- Alpha Step

- 03 ●
-
- Alpha Step
Thickness Measurement

- Alpha Step
- 04 ●
-
- AFM

- 05 ●
-
- Resistance meter

- 06 ●
-
- Spectrophotometer
U-4100

- Spectrophotometer
- 07 ●
-
- MINI SEM


